Abstract
M.Ing. (Mechanical Engineering)
Micro electromechanical systems (MEMS) are presented and the application of electro
discharge machining (EDM) to this scale of manufacture is discussed. A model relating
input variables to output variables of micro scale EDM is developed using dimensionless
groups and least squares regression. The model is used in a numeric simulation that
ultimately predicts the space of a micro crater. Experimental validation is performed to
check the reliability of the model by comparing the measurable experimental outputs with
the outputs predicted by the model. The results and validity of the model are discussed.