Abstract
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Ph.D. (Mechanical Engineering)
- Title
- The numerical investigation on the fundamental physical flow and chemical phenomena within the atomic layer deposition process
- Creators - without role
- Rigardt Alfred Maarten Coetzee
- Contributors - without role
- T.C. Jen
- Awarding Institution
- University of Johannesburg; Doctor of Philosophy (PHD)
- Theses and Dissertations
- Doctor of Philosophy (PHD), University of Johannesburg
- Identifiers
- 9911638607691
- Copyright
- University of JohannesburgE
- Academic Unit
- Department of Mechanical Engineering Science
- Resource Type
- Dissertation