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Electron cyclotron resonance plasma enhanced chemical vapour deposition of sioxny : optical properties and applications
Pavel Victorovich Bulkin
DIng, University of Johannesburg
03/04/2014
Handle:
https://hdl.handle.net/10210/9996
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Abstract
Thin films - Optical properties
Optical materials
Materials - Optical properties
D.Ing. (Electrical And Electronic Engineering ) Please refer to full text to view abstract
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Title
Electron cyclotron resonance plasma enhanced chemical vapour deposition of sioxny : optical properties and applications
Creators - without role
Pavel Victorovich Bulkin
Awarding Institution
University of Johannesburg; DIng
Theses and Dissertations
DIng, University of Johannesburg
Identifiers
9912758407691
Copyright
University of Johannesburg
Academic Unit
University of Johannesburg; Electrical and Electronic Engineering Studies
Resource Type
Dissertation
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