Thermal stability and reactivity of titanium halide precursors for the atomic layer deposition of TiO2 on a Pt (111) surface

Conference paper

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2020

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https://hdl.handle.net/10210/458243

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Title: Thermal stability and reactivity of titanium halide precursors for the atomic layer deposition of TiO2 on a Pt (111) surface
Creators - without role: Lesego M. Mohlala
Tien-Chien Jen
Peter Apata Olubambi
Identifiers: 999960607691
Academic Unit: Department of Mechanical Engineering Science
Resource Type: Conference paper